000 00481nam a2200205Ia 4500
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040 _aSOETPKD
041 _aEnglish
082 _a621.385
100 _aHSU, T. R.
245 _aMEMS AND MICROSYSTEMS
_bDESIGN AND MANUFACTURER
250 _a9TH
260 _bTATA McGRAW HILL
_aNA
_cNA
300 _aNA
_bNIL
500 _aCR3571
650 _aENGINEERING
650 _aNA
942 _cBK
999 _c52142
_d52142