| 000 | 00576nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 210602s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _cRS.1121.25 | ||
| 040 | _aSOETBBS | ||
| 041 | _aEnglish | ||
| 082 | _a621.381 5 | ||
| 100 | _aMADOU, M.J | ||
| 245 |
_aFUNDAMENTALS OF MICROFABRICATION _bTHE SCIENCE OF MINIATURIZATION |
||
| 250 | _a2ND | ||
| 260 |
_bC R C PRESS _aBOCA RATON _c2011 |
||
| 300 | _a723 | ||
| 500 | _aCR-2822 | ||
| 650 | _aELECTRONICS COMMUNICATION ENGINEERING | ||
| 650 | _aMICRO FABRICATION | ||
| 942 | _cBK | ||
| 999 |
_c84372 _d84372 |
||